Sacrificial inorganic polymer intermetal dielectric damascene wire and via liner

ABSTRACT

The present invention provides a method of forming a rigid interconnect structure, and the device therefrom, including the steps of providing a lower metal wiring layer having first metal lines positioned within a lower low-k dielectric; depositing an upper low-k dielectric atop the lower metal wiring layer; etching at least one portion of the upper low-k dielectric to provide at least one via to the first metal lines; forming rigid dielectric sidewall spacers in at least one via of the upper low-k dielectric; and forming second metal lines in at least one portion of the upper low-k dielectric. The rigid dielectric sidewall spacers may comprise of SiCH, SiC, SiNH, SiN, or SiO 2 . Alternatively, the via region of the interconnect structure may be strengthened with a mechanically rigid dielectric comprising SiO 2 , SiCOH, or doped silicate glass.

RELATED APPLICATIONS

This application is a divisional of U.S. application Ser. No. 11/873,300filed Oct. 16, 2007, which is a divisional of U.S. application Ser. No.11/558,959 filed Nov. 13, 2006, now U.S. Pat. No. 7,288,475, which is adivisional of U.S. application Ser. No. 10/707,811, filed Jan. 14, 2004,now U.S. Pat. No. 7,169,698.

FIELD OF THE INVENTION

The present invention relates generally to the manufacture ofsemiconductor devices, and more particularly to a method of forming aninterconnect via through a low dielectric constant (k) dielectricmaterial.

BACKGROUND

In the production of microelectronic devices, integrated circuitsutilize multilevel wiring structures for interconnecting regions withindevices and for interconnecting one or more devices within integratedcircuits. Conventionally, forming interconnect structures begins withforming a lower level of wiring followed by the deposition of aninterlevel dielectric layer and then a second level of wiring, where thefirst and second wiring levels may be connected by one or more metalfilled vias.

Conventional interconnect structures employ one or more metal layers.Each metal layer is typically made from aluminum alloys or tungsten.Interlevel and intralevel dielectrics (ILDs), such as silicon dioxide(SiO₂), are used to electrically isolate active elements and differentinterconnect signal paths from each other. The electrical connectionsbetween different interconnect levels are made through vias that areformed in the ILD layers. Typically, the vias are filled with a metal,such as tungsten.

Recently, there has been great interest to replace SiO₂ withlow-dielectric constant (“low-k”) materials as the intralevel and/orinterlevel dielectrics in interconnect structures. Examples of low-kdielectrics include polymer-based low-k dielectric materials, which mayor may not comprise a polymer, or carbon-doped oxide having a lowdielectric constant. An example of a low-k b-staged polymer is SiLK™(trademark of The Dow Chemical Company) having a composition including95% carbon. An example of a low-dielectric carbon doped oxide is SiCOH.It is desirable to employ low-k materials as insulators in ICinterconnect because these low-k materials reduce the interconnectcapacitance. Accordingly, these low-k materials increase the signalpropagation speed while reducing cross-talk noise and power dissipationin the interconnect.

The main problem with low-k materials is that they lack mechanicalrigidity and easily crack when subjected to thermal and mechanicalstresses. Conventionally, in via processing the interlevel dielectriclayer is etched to provide an opening in which a metal interconnect islater formed to provide a means of communication between metal layers.Despite the ability of low-k materials to reduce the interconnectcapacitance, forming via interconnects through low-k interlayerdielectrics having low mechanical strength produces a number ofdisadvantageous results. For example, if the dielectric is bent or ismechanically stressed, the interconnect metal may break within the via.Additionally, differences between the thermal coefficient of expansionof the metal interconnect and low-k interlevel and/or intraleveldielectrics produce further stresses that contribute to via breakage andchip failure.

Attempts to overcome the above disadvantages have resulted in furtherdifficulties. For example, referring to FIG. 1, attempts have been madeto use a thick refractory metal liner 22 to reinforce the low-kdielectric interlevel dielectric 35 and interconnect via 24. Viainterconnects 24 are typically formed from a low resistance interconnectmetal, such as copper. The high resistivity refractory metal liner 22has a resistance much greater than the low resistance copper used in thevia interconnect 24 and wiring 25, 26. Therefore, introducing refractorymetal within the via opening 24 disadvantageously increases theresistance of the interconnect structure 10.

Additionally, refractory metals, such as Ta, are difficult to depositusing chemical vapor deposition. Therefore, the refractory metal liner22 is typically deposited using sputter deposition. Sputter depositionfails to sufficiently deposit metal along the via 24 sidewalls of thelow-k ILD dielectric 35. In order to deposit the required thickness ofmetal along the sidewalls of the via 24, a very thick layer ofrefractory metal 22 must be sputter deposited atop of the lateralsurfaces. By increasing the thickness of the refractory metal liner 22,greater amounts of high resistance refractory metal is introduced intothe via opening. Additionally, introducing high resistance refractorymetal within the via opening 24 reduces the diameter of the lowresistance component of the via interconnect 24 further increasing it'sresistance.

In view of the above, a low resistivity via interconnect is neededhaving thin mechanically rigid dielectric layers.

SUMMARY

An objective of the present invention is to provide a method forproducing a low resistivity interconnect structure comprisingmechanically rigid low-k interlevel and/or intralevel dielectric layers.A further object of the present invention is to provide a rigidinterconnect structure comprising low-k dielectric materials withimproved thermal-mechanical properties. The term “low-k” is used hereinto denote a dielectric material having a dielectric constant preferablyless than about 3.5. The term “low-resistivity” is used herein to denotea resistivity of 2.0 μΩ-cm or less.

The present invention advantageously provides a method for providingrigid via interconnects through low-k dielectric layers, in whichstructural rigidity is provided by a set of thin rigid insulatingsidewall spacers that are positioned on the sidewalls of the viaopening. In broad terms, the inventive method comprises:

providing a lower metal wiring layer having first metal lines positionedwithin a lower low-k dielectric;

depositing an upper low-k dielectric atop the lower metal wiring layer;

etching at least one portion of the upper low-k dielectric to provide atleast one via to the first metal lines;

forming rigid dielectric sidewall spacers in at least one via of theupper low-k intralevel dielectric; and

forming second metal lines in at least one portion of the upper low-kdielectric.

More specifically, the rigid dielectric sidewall spacers may be formedby first depositing a conformal rigid dielectric liner within the viaand atop the upper low-k dielectric using a conformal depositionprocess. Thereafter, the horizontal surfaces of the conformal rigiddielectric liner are etched with an anisotropic etching process, wherethe remaining portion of the rigid dielectric liner positioned on thevia sidewalls forms the rigid dielectric spacers. The rigid dielectricspacers may be formed from any rigid insulating material including, butnot limited to: SiCH, SiC, SiNH, SiN, or SiO₂. The rigid dielectricsidewall spacers typically have a thickness ranging from about 10 nm toabout 100 nm. The term “rigid” it is meant to denote that the elasticmodulus is greater than 10 GPa, and preferably is greater than 50 GPa.

In broad terms, the above method produces an interconnect structurecomprising:

a lower metal wiring level comprising first metal lines positionedwithin a lower low-k dielectric; and

an upper metal wiring level atop the lower metal wiring level, the uppermetal wiring level comprising second metal lines positioned within anupper low-k dielectric;

a plurality of vias through a portion of the upper low-k dielectricelectrically connecting the lower metal wiring level and the upper metalwiring level, wherein the plurality of vias comprise a set of rigiddielectric sidewall spacers.

More specifically, the rigid dielectric sidewall spacers of the aboveinterconnect structure typically have a thickness ranging from about 10nm to about 100 nm and may comprise SiCH, SiC, SiCOH, SiNH, SiN, orSiO₂.

Another aspect of the present invention is a method of forming aninterconnect structure having increased rigidity low-k dielectric layersand improved thermal mechanical strength. Increased rigidity and thermalmechanical strength may be provided by a rigid dielectric layer having acoefficient of thermal expansion (CTE) that substantially matches thevia metal. Broadly, the inventive method comprises:

providing a lower metal wiring layer having first metal lines positionedwithin a lower low-k dielectric;

depositing a mechanically rigid dielectric atop the lower metal wiringlayer;

forming at least one via to a portion of the first metal lines throughthe mechanically rigid dielectric; and

forming an upper metal wiring layer having second metal lines positionedwithin an upper low-k dielectric, the second metal lines areelectrically connected to the first metal lines through the vias,wherein the vias comprises a metal having a coefficient of thermalexpansion that substantially matches the mechanically rigid dielectric.

More specifically, the mechanically rigid dielectric may comprise SiO₂,SiCOH, or F-doped glass and have a thickness that typically ranges fromabout 100 nm to about 1,000 nm, preferably being 300 nm. Themechanically rigid dielectric may comprise a coefficient of thermalexpansion ranging from about 0.1 ppm/° C. to about 5.0 ppm/° C. Thecoefficient of thermal expansion of the mechanically rigid dielectricmay be substantially matched to the coefficient of thermal expansion ofthe via metal. By reducing the differential in the coefficient ofthermal expansion between the via metal and the mechanical rigiddielectric, the thermal mechanical stresses that may be produced at theinterface of the via and the mechanical rigid dielectric are reduced.

In broad terms, the above method produces an interconnect structurecomprising:

a lower metal wiring level comprising first metal lines positionedwithin a lower low-k dielectric;

a mechanically rigid dielectric positioned on the lower metal wiringlevel, the mechanically rigid dielectric comprising a plurality of metalvias, wherein the plurality of metal vias have a coefficient of thermalexpansion that substantially matches the mechanically rigid dielectric;and

an upper metal wiring level atop the mechanically rigid dielectric, theupper metal wiring level comprising second metal lines positioned withinan upper low-k dielectric, wherein the plurality of metal viaselectrically connect the lower metal wiring level and the upper metalwiring level.

Specifically, the mechanically rigid dielectric may comprises SiO₂,SiCOH, or doped silicate glass.

DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts (through cross section) a prior art via interconnecthaving a thick and non-uniform TaN liner.

FIG. 2 depicts (through cross section) one embodiment of theinterconnect structure of the present invention including rigidinsulating sidewall spacers within a via positioned in a low-kdielectric layer.

FIGS. 3-12 depict (through cross section) the processing steps forproducing the interconnect structure depicted in FIG. 2.

FIG. 13 depicts (through cross section) another embodiment of thepresent invention including a mechanically rigid dielectric whichstrengthens the via region of an interconnect structure including low-kdielectric layers.

FIGS. 14-23 depict (through cross section) the processing steps forproducing the interconnect structure depicted in FIG. 13.

DETAILED DESCRIPTION

An interconnect structure, and method of forming thereof, will now bediscussed in greater detail referring to the drawings accompanying thepresent invention. It is noted in the accompanying drawings like andcorresponding elements are referred to by like reference numbers.Although the drawings show the presence of two wiring layers, thepresent invention is not limited to low resistance interconnectstructures having only two wiring layers. Instead, the present inventionworks equally well with interconnect structure having a plurality ofwiring levels, one over the other, in which a liner material enhancesthe rigidity of low-k dielectrics.

The present invention provides low resistance via interconnects throughrigid low-k interlevel and intralevel dielectric layers. In oneembodiment of the present invention, the rigidity of low-k dielectriclayers in the interconnect structures is increased by a thinmechanically rigid liner lining the sidewall of a via opening in a low-kdielectric. In prior art methods, a high resistance refractory metal,i.e., TaN, was sputter deposited to protect the low-k dielectric layervia sidewalls during device processing and to strengthen the low-kdielectric regions in which via interconnects are formed. Sputterdeposition is problematic, due in part, to the poor sputter rate andnon-uniformity of the deposited refractory metal on via sidewalls.

In one embodiment, the present invention strengthens the low-kdielectric interconnect regions by depositing a rigid dielectric liner11, preferably comprising SiC, by plasma enhanced chemical vapordeposition on the via 24 sidewalls of the low-k dielectric layer 6 andlater processing the rigid dielectric liner 11 into rigid dielectricsidewall spacers 12, on which the via interconnect is formed 24, asdepicted in FIG. 2. The rigid dielectric sidewall spacers 12 increasethe rigidity of the via interconnect 24 region of the low-k dielectriclayer, while maintaining a low interconnect capacitance. Further, therigid dielectric sidewall spacers 12 are uniformly deposited by chemicalvapor deposition methods, therefore overcoming the disadvantages ofprior methods utilizing sputter deposition to non-uniformly deposit highresistivity metal support structures.

Referring to FIG. 2, the interconnect structure 10 may comprise firstmetal lines 26 separated from second metal lines 25 by an upper low-kdielectric layer 6, where electrical contact between the first metallines 25 and second metal lines 26 is established by at least one viainterconnect 24 in the upper low-k dielectric layer 6. The sidewalls ofthe via interconnect 24 are reinforced by rigid dielectric sidewallspacers 12 having a thickness ranging from about 10 nm to about 100 nm,preferably being 30 nm. The dielectric sidewall spacers 12 may comprisesilicon carbide (SiC), silicon nitride (Si₃N₄), or silicon dioxide(SiO₂). A metal liner 29 may also be utilized to increase adhesionbetween the metal within the via interconnect 24 and the first metallines 26. The metal liner 29 may also function as a diffusion barrier.With the application of rigid dielectric sidewall spacers 12 asmechanical support to the thin low-k dielectric layers, thick metalsupport liners are no longer necessary. Therefore, metal liners having athickness of less than 50 nm, preferably less than 10 nm, are adequate.The method of forming the interconnect structure 10 depicted in FIG. 2is now described in greater detail referring to FIGS. 3-12.

Referring to FIG. 3, an initial structure 5 is provided comprising alower wiring level 31 including first metal lines 26, lower low-kdielectric 32, a lower rigid insulating layer 33, a lower etch stoplayer 34, an upper low-k dielectric layer 6, an upper rigid dielectriclayer 36, upper etch stop layer 7, and a dielectric cap layer 37.

The lower low-k dielectric 32 may comprise conventional dielectricmaterials formed using suitable deposition processes including, but notlimited to: CVD, PECVD, PVD, high density plasma CVD or spin on glassprocess. Preferably, the lower low-k dielectric 32 comprises a low-kdielectric having a thickness ranging from about 10 nm to about 1000 nm,preferably being 300 nm. The dielectric constant of the lower low-kdielectric 32 may be less than about 3.5, preferably ranging from about1.0 to about 3.0.

Low-k dielectrics may include organic dielectrics such as low dielectricconstant polymer dielectrics or may include low dielectric constantcarbon-doped oxides. One example of a low-k dielectric polymerdielectric is SiLK™ (trademark of The Dow Chemical Company).Specifically, SiLK™ is a class of polymer-based low-k dielectricmaterials comprising a b-staged polymer having a composition includingabout 95% carbon. An example of a low dielectric constant carbon dopedoxide is SiCOH.

A rigid dielectric layer 33 may be incorporated to strengthen theunderlying low-k dielectric layer 32. The rigid dielectric layer 33 maybe deposited using conventional deposition techniques and may comprisesilicon nitride (Si₃N₄), silicon carbide (SiC) and silicon dioxide(SiO₂), most preferably being silicon carbide (SiC). The rigiddielectric layer 33 may have a thickness ranging from about 5 nm toabout 100 nm, preferably being 30 nm.

The lower etch stop layer 34 may be deposited by conventional chemicalvapor deposition processes atop the first metal lines 26, rigiddielectric layer 33, and lower low-k dielectric 32. The lower etch stoplayer 34 may comprise Si nitrides, oxynitrides, or carbide materials,i.e., silicon nitride (Si_(x)N_(y)), silicon oxynitride (SiO_(x)N_(y)),or silicon carbide (SiC_(x)O_(y)N_(z)), having a thickness ranging fromabout 10 nm to about 100 nm, preferably being about 50 nm.

An upper low-k dielectric layer 6 may be deposited on the lower etchstop layer 34 using conventional processes such as chemical vapordeposition (CVD), plasma enhanced chemical vapor deposition (PECVD),physical vapor deposition (PVD), high density plasma CVD (HDPCVD) orspin-on processes. In one embodiment, the upper low-k dielectric 32comprises a thickness ranging from about 10 nm to about 1000 nm,preferably being 300 nm. The upper low-k dielectric layer 6 and thelower low-k dielectric 32 may or may not comprise the same material. Theupper low-k dielectric layer 6 preferably comprises SiLK™ as describedabove. Additionally, upper low-k dielectric layer 6 may have adielectric constant of less than about 3.5, preferably ranging fromabout 1.0 to about 3.0.

Still referring to FIG. 3, an upper rigid dielectric layer 36 may bepositioned on the upper low-k dielectric layer 6. The upper rigiddielectric layer 36 comprises a mechanically rigid dielectric materialincluding, but not limited to: silicon carbide (SiC), silicon nitride(Si₃N₄), or silicon dioxide (SiO₂). The upper rigid dielectric layer 36may have a thickness ranging from about 10 nm to about 100 nm,preferably being 30 nm. The upper rigid dielectric layer 36 and thelower rigid dielectric layer 33 may or may not comprise the samematerial. The upper rigid dielectric layer 36 preferably comprises SiChaving a thickness of about 30 nm.

Following the deposition of the upper rigid dielectric layer 36, anupper etch stop layer 7 may be deposited by conventional chemical vapordeposition processes. The upper etch stop layer 7 may comprise nitrideor oxynitrides materials, i.e., silicon nitride (Si₃N₄) or siliconoxynitride (SiO_(x)N_(y)), having a thickness ranging from about 10 nmto about 100 nm, preferably being about 50 nm. The upper etch stop 7most preferably comprises silicon nitride (Si₃N₄).

A dielectric cap layer 37 is then deposited atop the upper etch stoplayer 7. The dielectric cap layer 37 may be formed using conventionaldeposition methods, i.e., chemical vapor deposition, or alternativelymay be formed using thermal growth processes, i.e., thermal oxidation ornitridation. The dielectric cap layer 37 may be oxide, nitride, oroxynitride materials, preferably being silicon dioxide (SiO₂). Thedielectric cap layer 37 may have a thickness ranging from about 10 nm toabout 200 nm, preferably being 50 nm.

Still referring to FIG. 3, the initial structures 30 is then patternedand etched using conventional photolithography and etching. First, ananti-reflective coating (ARC) 9 may be spin applied to the upper surfaceof the initial structure 30 and baked. Alternatively, theanti-reflective coating (ARC) 9 may be omitted. A resist 8 patterned toetch the dielectric cap 37 is then produced by applying a layer ofphotoresist to the surface to be etched; exposing the layer ofphotoresist to a pattern of radiation; and then developing the patterninto the photoresist utilizing a conventional resist developer. Once thepatterning of the photoresist is completed, the sections covered by thephotoresist are protected, while the exposed regions are removed using aselective etching process that removes the unprotected regions.

Referring to FIG. 4, following photoresist patterning and developmentthe exposed portions of the antireflective coating 9 and dielectric caplayer 37 are etched using a directional etch process, i.e., reactive ionetch, selective to the upper etch stop layer 7. The resist 8 is thenremoved using a conventional chemical strip.

Referring to FIG. 5, following the deposition of an optional secondantireflective coating 14, another layer of photoresist is depositedatop the remaining portions of dielectric cap layer 37. A via patternedresist 39 is then formed from the photoresist layer using conventionalphotolithography and development processes. Portions underlying the viapattern resist are protected during subsequent etch process steps, whilethe exposed regions are etched to transfer the via pattern into theunderlying layers.

Referring to FIG. 6, the exposed portions of the optional secondantireflective layer 14, upper etch stop 7, and upper rigid dielectriclayer 36 are then etched selective to the via patterned resist 39 andlow-k dielectric layer 6 using a directional etch process, such asreactive ion etch. Preferably, the etch chemistry is selective toremoving Si₃N₄ of the upper etch stop 7 and SiC of the low-k dielectriclayer 6, while not substantially etching the upper low-k dielectriclayer 6 comprised of a polymer material or carbon doped oxide. The viapattern resist 39 may then be stripped using a chemical strip process.

Referring to FIG. 7, the via pattern may be partially extended throughthe low-k dielectric layer 6 using the remaining portions of thedielectric cap layer 37 and upper etch stop layer 7 as a hard maskduring a directional etch process selective to removing the exposedportions of the upper low-k dielectric layer 6. The duration of thelow-k dielectric etch process may be determined by end point detection.Preferably, the etch chemistry is selective to removing the polymermaterial or carbon doped oxide of the low-k dielectric layer 6 withoutsubstantially etching the SiO₂ of the remaining portions of thedielectric cap 37, and without substantially etching the exposed portionof the Si₃N₄ upper etch stop layer 34. In a preferred embodiment,following the low-k dielectric etch process, a portion of low-kdielectric material 6 remains atop the lower etch stop 34, as depictedin FIG. 7.

Referring now to FIG. 8, in a next process step the exposed portions ofthe etch stop layer 7 and upper rigid dielectric layer 36 are removed bya direction etch process, i.e., reactive ion etch, selective to thelow-k dielectric layer 6 and the remaining portions of the capdielectric layer 37, where the remaining portion of the cap dielectriclayer 37 functions as a hard mask. Preferably, the etch chemistryremoves an exposed portion of a Si₃N₄ upper etch stop 7 and etches anexposed portion a SiC upper rigid dielectric layer 36 selectively to theremaining portions of the SiO₂ cap dielectric layer 37 and polymericmaterial or carbon doped oxide of the upper low-k dielectric layer 6.

Turning now to FIG. 9, the top surfaces of the first metal lines 26 arenow exposed during a directional etch that recesses the upper low-kdielectric 6 and removes the lower etch stop 34 from the top surface ofthe first metal lines 26. First, a directional etch comprising a firstetch chemistry may be utilized to selectively remove upper low-kdielectric material 6 and expose the underlying lower etch stop 34.Thereafter, another directional etch comprising a second etch chemistryselectively removes the exposed portions of the lower etch stop 34without substantially etching the first metal lines 26, remainingportions of the dielectric cap 37, and the exposed portions of the upperlow-k dielectric layer 6. Alternatively, the top surface of the firstmetal lines 26 may be exposed during a single etch process that recessesthe upper low-k dielectric layer 6 and removes the underlying lower etchstop layer 34, while not substantially etching the remaining portion ofthe dielectric cap 37.

Turning to FIG. 10, a conformal rigid dielectric liner 11 is thendeposited using plasma enhanced chemical vapor deposition.Alternatively, the rigid dielectric liner 11 may be deposited using achemical vapor deposition processes including but not limited to:physical vapor deposition (PVD), plasma enhanced chemical vapordeposition (PECVD), high density plasma chemical vapor deposition(HDPCVD), THCVD, and low pressure chemical vapor deposition (LPCVD). Theconformal rigid insulating liner 11 may have a thickness ranging fromabout 10 nm to about 100 nm, preferably being about 30 nm. The conformalrigid dielectric liner 11 may be uniformly deposited on both thevertical and horizontal surfaces of the structure depicted in FIG. 9.The rigid dielectric liner 11 may be SiC, SiO₂, Si₃N₄ or combinationsthereof.

Turning now to FIG. 11, a directional etch process then removes thehorizontal surfaces of the conformal rigid dielectric liner 11, wherethe remaining portion of the conformal rigid dielectric liner 11positioned on the vertical surfaces of the structure form rigiddielectric sidewall spacers 12 positioned on the via 24 sidewalls of thelow-k dielectric layer 6. It is noted that the conformal rigidinsulating layer 11 is removed from the horizontal surface of the firstmetal lines 26 providing an exposed upper surface of the first metallines 26. The rigid insulating sidewall spacers 12 reinforce the via 24regions 24 of the mechanically weak low-k dielectric layer 6. It isfurther noted that the rigid dielectric sidewall spacers 12 protect theupper low-k dielectric layer 6 from damage or erosion duringconventional BEOL processing.

In an alternate embodiment, the conformal rigid insulating liner 11 maybe deposited within the via 24 and atop the horizontal surface of thelower etch stop 34. In this embodiment, the conformal rigid insulatingliner 11 is formed before the lower etch stop layer 34 is etched fromthe top surface of the first metal lines 26. Following the deposition ofthe conformal rigid insulating layer 11, a selective etch process isthen conducted to remove the horizontal surfaces of the conformal rigidinsulating layer 11 forming rigid insulating sidewall spacers 12 and toremove the lower etch stop layer 34 exposing the upper surface of thefirst metal lines 26.

Referring to FIG. 12, following the formation of the rigid insulatingsidewall spacers 12, a metal liner 13 is deposited atop the horizontaland vertical surfaces of the structure depicted in FIG. 11 including theexposed upper surface of the first metal lines 26 and the rigidinsulating sidewall spacers 12. The metal liner 13 may comprise Ta, TaN,W or WN. The metal liner 12 may have a thickness ranging from about 2 nmto about 50 nm, preferably being 10 nm. The metal liner 12 having theabove-disclosed thickness may be deposited by sputter deposition.

In this embodiment, rigidity is provided to the interconnect structure10 by the rigid insulating sidewall spacers 12. Therefore, it is notnecessary that the metal liner 13 provide rigidity to the structure andtherefore does not require that a thick metal liner 11 be deposited. Themetal liner 13 may increase the adhesion of the first metal wiring layerto subsequently deposited metals. The metal liner 13 may also functionas a diffusion barrier between the lower metal wiring 26 and laterdeposited materials.

Following metal liner 13 formation, a second metal lines 25 and metalvias 16 are formed by depositing a metal. The metal may be copper,aluminum, silver, gold and alloys thereof, preferably being copper. Themetal may be deposited by sputter deposition or by electroplating.Preferably, copper is deposited in a two-step process beginning withforming a copper seed layer (not shown) by sputter deposition and thenelectroplating copper atop the copper seed layer. Following metaldeposition, the deposited metal is then planarized back and polishedusing chemical mechanical polishing techniques or similar planarizationmethods. The structure is planarized to the upper rigid layer 36,therefore removing the remaining portions of the cap dielectric layer 37and the upper etch stop layer 7.

In another embodiment of the present invention, a mechanically rigiddielectric layer 35 is positioned between a lower metal wiring level 31and an upper metal wiring level 45, where electrical communicationbetween the first and second metal wiring levels is provided byinterconnect vias extending through the mechanically rigid dielectriclayer 35, as depicted in FIG. 13.

Referring to FIG. 13, the mechanically rigid dielectric 35 surroundingthe via 24 may be a dielectric material having a higher mechanicalstrength than low-k dielectric layers 23, 32. Additionally, thedielectric utilized in the mechanically rigid dielectric layer 35 mayhave a coefficient of thermal expansion that is matched to thecoefficient of thermal expansion of the metal utilized in the via 24.Preferably, the mechanically rigid dielectric layer 35 may compriseoxides, such as SiO₂; doped silicate glass, such as fluorinated silicateglass; or carbon doped oxides, such as SiCOH, where the coefficient ofthermal expansion is matched with the interconnect metal, i.e., copper.

Although the mechanically rigid dielectric layer 35 may provide greaterrigidity to the interconnect structure than the first embodiment,depicted in FIGS. 2-12, the mechanically rigid dielectric 35 has ahigher dielectric constant than dielectric layers comprising of low-kpolymers or low-k carbon doped oxides. Therefore, the mechanically rigid35 may increase the interconnect capacitance of the device when comparedwith the embodiment depicted in FIGS. 2-12. The method of forming theinterconnect structure 10 depicted in FIG. 13 is now described ingreater detail referring to FIGS. 14-23.

Referring to FIG. 14, an initial structure 30 is provided comprising alower wiring level 31 including first metal lines 26, lower low-kdielectric 32, and lower rigid insulating layer 33, lower etch stoplayer 34, mechanically rigid dielectric 35; upper low-k dielectric 23;upper rigid insulating layer 36; and cap dielectric layer 37.

The lower low-k dielectric 32 may be formed using suitable processessuch as CVD, PECVD, PVD, high density plasma CVD or spin-on glassprocess. The lower low-k dielectric 32 comprises a low-k dielectrichaving a thickness ranging from about 10 nm to about 1000 nm, preferablybeing 300 nm. Preferably the lower low-k dielectric 32 has a dielectricconstant of less than about 3.5, preferably ranging from 1.0 to 3.0.

Low-k dielectrics may include organic dielectrics such as low dielectricconstant polymer dielectrics or may include low dielectric constantcarbon-doped oxides. One example of a low-k dielectric polymerdielectric is SiLK™ (trademark of The Dow Chemical Company).Specifically, SiLK™ is a class of polymer-based low-k dielectricmaterials comprising a b-staged polymer having a composition includingabout 95% carbon. An example of a low dielectric constant carbon dopedoxide is SiCOH.

A rigid dielectric layer 33 may be incorporated to strengthen theunderlying low-k dielectric layer 32. The rigid dielectric layer 33 maybe deposited using conventional deposition techniques and may comprisesilicon nitride (Si₃N₄), silicon carbide (SiC) and silicon dioxide(SiO₂), most preferably being silicon carbide (SiC). The rigiddielectric layer may have a thickness ranging from about 10 nm to about100 nm, preferably being 30 nm.

The first metal lines 26 may be formed within the lower low-k dielectric32 by conventional methods, including but not limited to: photoresistapplication, photolithography patterning; pattern development;selectively etching lower rigid dielectric layer 33 and lower low-kdielectric 32; pattern strip; metal sputter deposition; andplanarization. First metal lines 26 may comprise conventional wiringmetals including, but not limited to: aluminum (Al), copper (Cu),tungsten (W), gold (Au) and silver (Ag) and alloys thereof. The firstmetal lines preferably comprise copper.

The lower etch stop layer 34 may be deposited by conventional chemicalvapor deposition processes atop the first metal lines 26, rigiddielectric layer 33, and lower low-k dielectric 32. The lower etch stoplayer 34 may comprise nitride or oxynitrides materials, i.e., siliconnitride (Si₃N₄) or silicon oxynitride (SiO_(x)N_(y)), having a thicknessranging from about 10 nm to about 100 nm, preferably being about 50 nm.The lower etch stop layer preferably comprises Si₃N₄.

The mechanically rigid dielectric 35 may be applied atop the lower etchstop layer 34 using conventional chemical vapor deposition processes,where the mechanically rigid dielectric 35 has a thickness ranging fromabout 100 nm to about 1,000 nm, preferably being 300 nm. Preferably, themechanically rigid dielectric layer 35 may comprise oxides, such asSiO₂; doped silicate glass, such as fluorinated silicate glass; orcarbon doped oxides, such as SiCOH. Alternatively, the mechanicallyrigid dielectric 35 may be other dielectric materials includingnitrides, oxynitrides, and other low-k dielectrics. The mechanicallyrigid dielectric 35 may also have a coefficient of thermal expansionthat is matched to the interconnect metal. The coefficient of thermalexpansion of the mechanically rigid dielectric 35 may range from about0.1 ppm/° C. to about 5 ppm/° C., preferably being 1 ppm/° C. Thedielectric constant of the mechanically rigid dielectric 35 may rangefrom 2.5 to about 4.2, preferably being 3.2.

An upper low-k dielectric layer 23 can be deposited on the mechanicallyrigid dielectric 35 using conventional processes such as CVD, PECVD,PVD, high density plasma CVD or spin-on processes. In one embodiment,the lower low-k dielectric 23 comprises a low-k dielectric having athickness ranging from about 10 nm to about 1000 nm, preferably being300 nm. The upper low-k dielectric layer 23 and the lower low-kdielectric 32 may or may not comprise the same material. The upper low-kdielectric layer 23 preferably comprises SiLK™ as described above. Theupper low-k dielectric layer 23 has a dielectric constant of less thanabout 3.5, preferably ranging from about 1.0 to about 3.0.

Still referring to FIG. 14, an upper rigid dielectric layer 36 may bepositioned on the upper low-k dielectric layer 23. The upper rigiddielectric layer 36 comprises a mechanically rigid insulating layerincluding, but not limited to: silicon carbide (SiC), silicon nitride(Si₃N₄), or silicon dioxide (SiO₂). The upper rigid dielectric layer 36may have a thickness ranging from about 10 nm to about 100 nm,preferably being 30 nm. The upper rigid dielectric layer 36 and thelower rigid dielectric layer 33 may or may not comprise the samematerial. The upper rigid dielectric layer 36 preferably comprisessilicon carbide (SiC) having a thickness of about 30 nm.

A dielectric cap layer 37 is then deposited atop the upper rigiddielectric layer 36. The dielectric cap layer 37 can be formed usingconventional deposition methods, i.e., chemical vapor deposition, oralternatively may be formed using thermal growth processes, i.e.,thermal oxidation or nitridation. The dielectric cap layer 37 may beoxide, nitride, or oxynitride materials, preferably being silicondioxide (SiO₂). The dielectric cap layer 37 may have a thickness rangingfrom about 10 nm to about 200 nm, preferably being 50 nm.

Referring to FIG. 14, the initial structure 30 is then patterned andetched using conventional photolithography and etch processes. First, ananti-reflective coating (ARC) 38 is formed on the upper surface of theinitial structure 30. Alternatively, the anti-reflective coating (ARC)38 may be omitted. A via patterned resist 39 is then produced byapplying a photoresist to the surface to be etched; exposing thephotoresist to a pattern of radiation; and then developing the patternutilizing conventional resist developer. Once the patterning of thephotoresist is completed, the sections covered by the photoresist areprotected while the exposed regions are removed using a selectiveetching process that removes the unprotected regions.

Referring to FIG. 15, following resist patterning and development theexposed portions of the underlying dielectric cap layer 37, upper rigiddielectric layer 36, and upper low-k dielectric 23 are etched using adirectional etch process, i.e., reactive ion etch, selective to themechanically rigid dielectric 35. The etch process may includefluorinated etch chemistries that are known to those skilled in the art.The via patterned resist 39 is then removed using a conventionalchemical strip.

Referring to FIG. 16, in a next process step a conformal rigid liner 27is deposited using chemical vapor deposition processes including, butnot limited to: physical vapor deposition (PVD), plasma enhancedchemical vapor deposition (PECVD), high density plasma chemical vapordeposition (HDPCVD), and low pressure chemical vapor deposition (LPCVD).The conformal rigid liner 27 may be any rigid insulating materialincluding, but not limited to: silicon carbide, silicon nitride, silicondioxide. The conformal rigid liner 27 may have a thickness ranging formabout 10 nm to about 100 nm, preferably being 30 nm. Most preferably,the conformal rigid liner 27 is silicon carbide having a thickness onthe order of 30 nm.

Referring to FIG. 17, a selective directional etch, i.e., reactive ionetch, then removes the horizontal surfaces of the conformal rigid liner27, where the conformal rigid liner 27 remains along the sidewalls ofthe dielectric cap 37, upper rigid dielectric layer 36, and upper low-kdielectric 23; forming sacrificial rigid sidewall spacers 28. Thedirection etch process is selective to the mechanically rigid dielectric35. End point detection may be employed to ensure that the integrity ofthe mechanically rigid dielectric 35 is not compromised during theconformal liner 27 etch. Alternatively, the etch process may be timed.

Referring to FIG. 18, a metal line patterned resist 40 is then formedfrom a layer of photoresist, which is thereafter patterned usingconventional photolithography and development processes, as describedabove. In one embodiment, the metal line patterned resist 40 exposes anunderlying portion wider than the portion of the initial structure 5exposed by the via patterned resist 39.

Referring to FIG. 19, using the metal line patterned resist 40 as anetch mask another direction etch process, i.e., reactive ion etch, isthen conducted removing the exposed portions of dielectric cap layer 37,horizontal surfaces of the conformal rigid liner 27, and the upper rigiddielectric 36 selective to the upper low-k dielectric 23. Preferably,the exposed portions of the structure not protected by the overlyingmetal line patterned resist 40 are removed by an etch chemistry that isselective to removing SiO₂, of the dielectric cap layer 37; SiC of upperrigid dielectric layer 36; and SiC of the conformal rigid liner 27;without etching the polymer material of the upper low-k dielectric 23,preferably being SiLK™. The vertical height of the sacrificial rigidsidewall spacers 28 may be recessed by the directional etch. The etchchemistry may comprise fluorinated species. In order to ensure that themechanically rigid dielectric 35 is not overetched the selective etchprocess may be timed or an end-point detection may be utilized tomonitor the etch process.

Referring to FIG. 20, utilizing the same metal line patterned resist 40,a directional etch, i.e., reactive ion etch, selective to themechanically rigid dielectric 35 produces a via 24 terminating on theetch stop layer 34. It is noted that during this etch step the patternoriginally produced by the via pattern resist 39 is extended through themechanically rigid dielectric 35. In one embodiment, the directionaletch selectively removes oxide material, i.e., SiO₂, from themechanically rigid dielectric 35 that is not protected by the overlyingmetal line patterned resist 40. Preferably, the etch chemistry may beselective to the Si₃N₄ etch stop layer 33. An additional etch may beconducted following the oxide etch to remove the rigid sacrificialsidewall spacers 28.

Referring to FIG. 21, an upper low-k dielectric 23 etch is thenconducted using a direction etch having an etch chemistry selective tothe mechanically rigid dielectric 35 and etch stop layer 33. Preferably,the etch chemistry removes the polymer of the low-k dielectric layer 23,i.e., SiLK™, without substantially etching the SiO₂ of the mechanicallyrigid dielectric 35 and the Si₃N₄ etch stop layer 33. The metal linepatterned resist 40 is stripped during the low-k dielectric etch.

Referring to FIG. 22, the exposed portion of the lower etch stop barrier33 is then removed using a directional etch, that may be timed to ensurethat the integrity of the underlying first metal lines 26 is notcompromised during the etch stop barrier 33 etch. Preferably, the etchstop barrier etch comprises an etch chemistry that is selective to thedielectric cap 37 material, i.e. SiO₂, and the first metal lines 26. Endpoint detection methods may also be employed to ensure that theunderlying metal lines 26 are not etched. At the conclusion of the etchstop barrier 33 etch the upper surface of the first metal lines 26 isexposed.

Turning now to FIG. 23, a metal liner 13 is then deposited on the topsurface of the structure depicted in FIG. 22, including the exposed topsurface of the lower metal wiring 26. The metal liner 13 may be thinlayer of Ta, TaN, W, TiN, or WN having a thickness ranging from 2 nm toabout 50 nm, with about 5 nm being preferred. The metal liner 13 may bedeposited using conventional deposition processes well known within theskill of the art, including but not limited to sputter deposition,atomic layer deposition, and chemical vapor deposition. In thisembodiment, rigidity is provided to the interconnect structure 10 by themechanically rigid dielectric 35. Therefore, it is not required that themetal liner 13 provide rigidity to the structure and therefore does notrequire that a thick metal liner 11 be deposited. The metal liner 13 mayincrease the adhesion of subsequently deposited metals to the underlyingfirst metal wiring 26 and/or act as a barrier layer.

In a next process step, a high conductivity metal is deposited atop themetal liner 12. The high conductivity metal may comprise copper (Cu),silver (Ag), gold (Au), aluminum (Al) and alloys thereof. The highconductivity metal may be deposited by conventional metal depositionprocesses well known within the skill of the art, including but notlimited to: plating, chemical vapor deposition, and sputter deposition.Preferably, copper is deposited in a two-step process beginning withforming a copper seed layer (not shown) by sputter deposition and thenelectroplating copper atop the copper seed layer. Following metaldeposition the deposited metal is then planarized back and polishedusing chemical mechanical polishing techniques or similar planarizationmethods. The resultant structure is second metal lines 25, as depictedin FIG. 23.

While the present invention has been particularly shown and describedwith respect to preferred embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present invention. It is therefore intended that the presentinvention not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

1. An interconnect structure comprising: a lower metal wiring levelcomprising first metal lines positioned within a dielectric stackincluding a lower low-k dielectric and a first rigid dielectric layerlocated atop said lower low-k dielectric, wherein each of said firstmetal lines has an upper surface that is coplanar with an upper surfaceof the first rigid dielectric layer; a mechanically rigid dielectricpositioned on said lower metal wiring level, said mechanically rigiddielectric comprising a plurality of metal filled vias; and an uppermetal wiring level atop said mechanically rigid dielectric, said uppermetal wiring level comprising second metal lines positioned within adielectric stack including an upper low-k dielectric and a second rigiddielectric layer located atop said upper low-k dielectric, said firstand second rigid dielectric layers comprising silicon nitride or siliconcarbide, where said plurality of metal vias electrically connect saidlower metal wiring level and said upper metal wiring level, wherein saidplurality of metal filled vias comprise a set of rigid dielectricsidewall spacers, wherein at least some of the rigid dielectric sidewallspacers have an upper surface that is coplanar with an upper surface ofsaid plurality of metal filled vias, wherein a dielectric material forsaid rigid dielectric sidewall spacer is selected from the groupconsisting of SiCH, SiC, SiNH, SiN, and SiO₂.
 2. The interconnectstructure of claim 1 wherein said plurality of metal filled vias has acoefficient of thermal expansion matched to said mechanically rigiddielectric.
 3. The interconnect structure of claim 2 wherein acoefficient of thermal expansion of the mechanically rigid dielectricranges from about 0.1 ppm/° C. to about 5 ppm/° C.
 4. The interconnectstructure of claim 1 wherein said mechanically rigid dielectriccomprises SiO₂, SiCOH, or doped silicate glass.
 5. The interconnectstructure of claim 1 wherein each of said set of rigid dielectricsidewall spacers have a thickness ranging from about 10 nm to about 100nm.
 6. The interconnect structure of claim 1 wherein said set of rigiddielectric sidewall spacers have an elastic modulus of greater than 10GPa.
 7. The interconnect structure of claim 1 wherein said set of rigiddielectric sidewall spacers have an elastic modulus of greater than 50GPa.
 8. The interconnect structure of claim 1 wherein the material ofsaid rigid dielectric spacers is SiCH.
 9. The interconnect structure ofclaim 1 wherein said first rigid dielectric layer has a thickness offrom 5 to 100 nm.
 10. The interconnect structure of claim 1 wherein saidsecond rigid dielectric layer has a thickness of from 5 to 100 nm. 11.The interconnect structure of claim 1 further comprising a first etchstop layer located between the first rigid dielectric layer and saidmechanically rigid dielectric.
 12. The interconnect structure of claim 1further comprising a second etch stop layer located atop the secondrigid dielectric layer.